Goteborg
Sweden
9
2011-12-15
The entities that hold a legal rights for patent applications filed by inventor Stiblert Lars:
Lars Stiblert from Goteborg, SE has applied for patents for these inventions. The list has both pending applications and granted patents:
Method For Measuring The Position Of A Mark In A Deflector System
#2 | 2010-12-09Writing apparatuses and methods
#3 | 2009-01-29Method and apparatus for mura detection and metrology
#4 | 2008-11-27Method for measuring the position of a mark in a deflector system
#5 | 2008-02-07Platforms, apparatuses, systems and methods for processing and analyzing substrates
#6 | 2007-08-09Writing apparatuses and methods
#7 | 2005-04-28Method for writing a pattern on a surface intended for use in exposure equipment and for measuring the physical properties of the surface
#8 | 2005-04-28Method for calibration of a metrology stage
#9 | 2005-04-21Method and apparatus for image formation
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