Taby
Sweden
103
2013-09-26
88
2014-06-17
These are the the leading inventors for applications assigned to Micronic Laser Systems AB:
Micronic Laser Systems AB based in Taby, SE has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Method and device using rotating printing arm to project or view image across a workpiece
#2 | 2012-12-06 ✅ Patent 8,767,185 granted on 2014-07-01Criss-cross writing strategy
#3 | 2012-03-08 ✅ Patent 8,539,395 granted on 2013-09-17Method and apparatus for merging multiple geometrical pixel images and generating a single modulator pixel image
#4 | 2011-10-06 ✅ Patent 8,767,175 granted on 2014-07-011.5D SLM for lithography
#5 | 2011-10-06 ✅ Patent 8,466,945 granted on 2013-06-18Methods and device for laser processing
#6 | 2011-09-08ILLUMINATION METHODS AND DEVICES FOR PARTIALLY COHERENT ILLUMINATION
#7 | 2010-09-09 ✅ Patent 8,312,393 granted on 2012-11-13Variable overlap method and device for stitching together lithographic stripes
#8 | 2010-09-09 ✅ Patent 8,861,066 granted on 2014-10-14Oversized micro-mechanical light modulator with redundant elements, device and method
#9 | 2010-09-09 ✅ Patent 8,472,089 granted on 2013-06-25Rotor imaging system and method with variable-rate pixel clock
#10 | 2010-09-09 ✅ Patent 8,570,613 granted on 2013-10-29Lithographic printing system with placement corrections
#11 | 2010-09-09 ✅ Patent 8,537,416 granted on 2013-09-17Rotor optics imaging method and system with variable dose during sweep
#12 | 2010-09-09Statistical Illuminator
#13 | 2010-08-19 ✅ Patent 8,531,755 granted on 2013-09-10SLM device and method combining multiple mirrors for high-power delivery
#14 | 2010-06-10GRADIENT ASSISTED IMAGE RESAMPLING IN MICRO-LITHOGRAPHIC PRINTING
#15 | 2010-06-10 ✅ Patent 8,442,302 granted on 2013-05-14Method and device using rotating printing arm to project or view image across a workpiece
#16 | 2010-05-27 ✅ Patent 8,351,020 granted on 2013-01-08Image reading and writing using a complex two-dimensional interlace scheme
#17 | 2010-04-22 ✅ Patent 7,923,182 granted on 2011-04-12Multi-focus method of enhanced three-dimensional exposure of resist
#18 | 2010-04-22 ✅ Patent 8,067,134 granted on 2011-11-29Method of iterative compensation for non-linear effects in three-dimensional exposure of resist
#19 | 2010-04-22 ✅ Patent 8,057,971 granted on 2011-11-15Method of compensation for bleaching of resist during three-dimensional exposure of resist
#20 | 2009-12-10 ✅ Patent 8,077,377 granted on 2011-12-13Spatial light modulator with structured mirror surfaces
#21 | 2009-12-10Image Enhancement Technique
#22 | 2009-09-15 ✅ Patent 7,590,966 granted on 2009-09-15Data path for high performance pattern generator
#23 | 2009-08-27METHOD AND APPARATUS FOR PROJECTION PRINTING
#24 | 2009-08-06 ✅ Patent 7,919,218 granted on 2011-04-05Method for a multiple exposure beams lithography tool
#25 | 2009-07-30 ✅ Patent 7,787,174 granted on 2010-08-31Pattern generator
#26 | 2009-07-02 ✅ Patent 7,709,165 granted on 2010-05-04Image enhancement for multiple exposure beams
#27 | 2009-06-11 ✅ Patent 7,710,634 granted on 2010-05-04Pattern generator
#28 | 2009-03-12 ✅ Patent 8,144,307 granted on 2012-03-27Image forming method and apparatus
#29 | 2009-01-29 ✅ Patent 8,160,351 granted on 2012-04-17Method and apparatus for mura detection and metrology
#30 | 2009-01-08 ✅ Patent 7,759,620 granted on 2010-07-20Fourier plane analysis and refinement of SLM calibration
#31 | 2008-12-25 ✅ Patent 8,456,613 granted on 2013-06-04Method and apparatus for quantification of illumination non-uniformity in the mask plane of a lithographic exposure system
#32 | 2008-11-27 ✅ Patent 7,912,671 granted on 2011-03-22Method for measuring the position of a mark in a deflector system
#33 | 2008-10-28 ✅ Patent 7,444,616 granted on 2008-10-28Method for error reduction in lithography
#34 | 2008-10-23 ✅ Patent 7,930,653 granted on 2011-04-19Triangulating design data and encoding design intent for microlithographic printing
#35 | 2008-10-02METHOD AND DEVICE FOR DATA INTEGRITY CHECKING
#36 | 2008-08-07 ✅ Patent 7,567,375 granted on 2009-07-28Hidden hinge MEMS device
#37 | 2008-06-05 ✅ Patent 7,588,870 granted on 2009-09-15Dual layer workpiece masking and manufacturing process
#38 | 2008-05-29 ✅ Patent 7,842,926 granted on 2010-11-30Method and device for correcting SLM stamp image imperfections
#39 | 2008-04-03 ✅ Patent 7,646,919 granted on 2010-01-12Graphics engine for high precision lithography
#40 | 2008-04-03 ✅ Patent 7,800,815 granted on 2010-09-21Pattern generator
#41 | 2008-03-27 ✅ Patent 7,715,641 granted on 2010-05-11Graphics engine for high precision lithography
#42 | 2008-03-13 ✅ Patent 7,535,623 granted on 2009-05-19SLM addressing methods and apparatuses
#43 | 2008-03-06Electromagnetic Radiation Pulse Timing Control
#44 | 2007-12-06SLM STRUCTURE COMPRISING SEMICONDUCTING MATERIAL
#45 | 2007-11-27 ✅ Patent 7,302,111 granted on 2007-11-27Graphics engine for high precision lithography
#46 | 2007-11-22METHOD AND PROCESS FOR IMMERSION EXPOSURE OF A SUBSTRATE
#47 | 2007-11-15 ✅ Patent 7,705,965 granted on 2010-04-27Backside lithography and backside immersion lithography
#48 | 2007-11-01 ✅ Patent 7,808,648 granted on 2010-10-05Method and device for optical determination of physical properties of features, not much larger than the optical wavelength used, on a test sample
#49 | 2007-10-11 ✅ Patent 7,525,671 granted on 2009-04-28Registration method and apparatus therefor
#50 | 2007-09-06 ✅ Patent 7,934,172 granted on 2011-04-26SLM lithography: printing to below K1=.30 without previous OPC processing
#51 | 2007-09-06 ✅ Patent 7,446,857 granted on 2008-11-04Image forming method and apparatus
#52 | 2007-08-09Method and apparatus for printing patterns with improved cd uniformity
#53 | 2007-07-19 ✅ Patent 7,755,657 granted on 2010-07-13Method for high precision printing of patterns
#54 | 2007-06-21 ✅ Patent 7,528,932 granted on 2009-05-05SLM direct writer
#55 | 2007-06-07 ✅ Patent 7,650,588 granted on 2010-01-19Methods and systems for pattern generation based on multiple forms of design data
#56 | 2007-05-10 ✅ Patent 7,323,291 granted on 2008-01-29Dual layer workpiece masking and manufacturing process
#57 | 2006-12-26 ✅ Patent 7,153,634 granted on 2006-12-26Dual layer workpiece masking and manufacturing process
#58 | 2006-12-12 ✅ Patent 7,148,971 granted on 2006-12-12Apparatus for measuring the physical properties of a surface and a pattern generating apparatus for writing a pattern on a surface
#59 | 2006-09-12 ✅ Patent 7,106,490 granted on 2006-09-12Methods and systems for improved boundary contrast
#60 | 2006-08-24 ✅ Patent 7,184,192 granted on 2007-02-27Pattern generator diffractive mirror methods and systems
#61 | 2006-08-24Addressing method of movable elements in a spatial light modulator (SLM)
#62 | 2006-08-08 ✅ Patent 7,088,468 granted on 2006-08-08Data-conversion method for a multibeam laser writer for very complex microlithographic patterns
#63 | 2006-06-13 ✅ Patent 7,061,226 granted on 2006-06-13Method to detect a defective element
#64 | 2006-05-25Ultra-flat reflective MEMS optical elements
#65 | 2006-05-18 ✅ Patent 7,365,901 granted on 2008-04-29Pattern generator
#66 | 2006-04-13 ✅ Patent 7,158,280 granted on 2007-01-02Methods and systems for improved boundary contrast
#67 | 2006-03-30Phase-shifting optical maskless lithography enabling asics at the 65 and 45 NM nodes
#68 | 2006-03-16 ✅ Patent 7,167,231 granted on 2007-01-23Method and apparatus for printing large data flows
#69 | 2006-03-16 ✅ Patent 7,705,963 granted on 2010-04-27Pupil improvement of incoherent imaging systems for enhanced CD linearity
#70 | 2006-03-09 ✅ Patent 7,278,129 granted on 2007-10-02Healing algorithm
#71 | 2006-03-07 ✅ Patent 7,009,753 granted on 2006-03-07Pattern generator
#72 | 2006-02-23 ✅ Patent 7,542,129 granted on 2009-06-02Patterning apparatuses and methods for the same
#73 | 2006-02-09 ✅ Patent 7,488,957 granted on 2009-02-10Pattern generation methods and apparatuses
#74 | 2006-01-26 ✅ Patent 7,424,330 granted on 2008-09-09Method and apparatus for controlling deformable actuators
#75 | 2006-01-17 ✅ Patent 6,987,599 granted on 2006-01-17Pattern generator mirror configurations
#76 | 2005-12-13 ✅ Patent 6,975,443 granted on 2005-12-13Multi-beam pattern generator
#77 | 2005-12-08 ✅ Patent 7,369,291 granted on 2008-05-06SLM addressing methods and apparatuses
#78 | 2005-10-27 ✅ Patent 7,072,090 granted on 2006-07-04Addressing of an SLM
#79 | 2005-10-13 ✅ Patent 7,034,986 granted on 2006-04-25Pattern generator mirror configurations
#80 | 2005-10-06Mask blank and a method for producing the same
#81 | 2005-10-06 ✅ Patent 7,085,076 granted on 2006-08-01Aperture stop assembly for high power laser beams
#82 | 2005-10-06 ✅ Patent 7,618,751 granted on 2009-11-17RET for optical maskless lithography
#83 | 2005-09-27 ✅ Patent 6,950,194 granted on 2005-09-27Alignment sensor
#84 | 2005-08-25 ✅ Patent 7,328,425 granted on 2008-02-05Method and device for correcting SLM stamp image imperfections
#85 | 2005-08-18 ✅ Patent 7,285,365 granted on 2007-10-23Image enhancement for multiple exposure beams
#86 | 2005-08-11 ✅ Patent 7,369,962 granted on 2008-05-06Method and device for data integrity checking
#87 | 2005-08-04 ✅ Patent 7,215,409 granted on 2007-05-08Image forming method and apparatus
#88 | 2005-07-21 ✅ Patent 7,109,510 granted on 2006-09-19Method and apparatus for aligning a substrate on a stage
#89 | 2005-06-09 ✅ Patent 7,075,693 granted on 2006-07-11Addressing method of movable elements in a spatial light modulator (SLM)
#90 | 2005-06-07 ✅ Patent 6,903,859 granted on 2005-06-07Homogenizer
#91 | 2005-05-26Method involving a mask or a reticle
#92 | 2005-05-10 ✅ Patent 6,891,655 granted on 2005-05-10High energy, low energy density, radiation-resistant optics used with micro-electromechanical devices
#93 | 2005-04-28 ✅ Patent 6,948,254 granted on 2005-09-27Method for calibration of a metrology stage
#94 | 2005-04-21 ✅ Patent 7,405,414 granted on 2008-07-29Method and apparatus for patterning a workpiece
#95 | 2005-04-21 ✅ Patent 7,365,829 granted on 2008-04-29Method and apparatus for image formation
#96 | 2005-04-19 ✅ Patent 6,883,158 granted on 2005-04-19Method for error reduction in lithography
#97 | 2005-04-07 ✅ Patent 7,369,217 granted on 2008-05-06Method and device for immersion lithography
#98 | 2005-03-10 ✅ Patent 7,150,949 granted on 2006-12-19Further method to pattern a substrate
#99 | 2005-03-10 ✅ Patent 7,411,651 granted on 2008-08-12PSM alignment method and device
#100 | 2005-03-03 ✅ Patent 7,211,453 granted on 2007-05-01Method and apparatus for personalization of semiconductor
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