Dresden
Germany
13
2010-09-30
The entities that hold a legal rights for patent applications filed by inventor Schulze Uwe:
Uwe Schulze from Dresden, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Method and apparatus for dispatching workpieces to tools based on processing and performance history
#2 | 2010-06-24Method and system for advanced process control in an etch system by gas flow control on the basis of CD measurements
#3 | 2010-02-04Method and system for reducing overlay errors in semiconductor volume production using a mixed tool scenario
#4 | 2008-03-06Method and system for reducing overlay errors within exposure fields by APC control strategies
#5 | 2007-10-11Time weighted moving average filter
#6 | 2007-08-02Method and system for advanced process control in an etch system by gas flow control on the basis of CD measurements
#7 | 2007-03-01Method and system for automatically detecting exposed substrates having a high probability for defocused exposure fields
#8 | 2007-02-01Method and system for estimating a state of an uninitialized advanced process controller by using segregated controller data
#9 | 2006-11-30Method and system for advanced process control including tool dependent machine constants
#10 | 2006-10-05Advanced process control model incorporating a target offset term
#11 | 2006-08-31Method of process control
#12 | 2006-02-28Method and system for improving exposure uniformity in a step and repeat process
#13 | 2005-09-20Method and system for improving the efficiency of a mechanical alignment tool
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