Mountain View, California
United States
9
2010-05-25
The entities that hold a legal rights for patent applications filed by inventor Shek Meiyee:
Meiyee Shek from Mountain View, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Reduction of hillocks prior to dielectric barrier deposition in Cu damascene
#2 | 2010-02-25Method to improve the step coverage and pattern loading for dielectric films
#3 | 2009-01-08Methods and apparatuses promoting adhesion of dielectric barrier film to copper
#4 | 2008-05-13Reduction of hillocks prior to dielectric barrier deposition in Cu damascene
#5 | 2008-03-27REDUCTION OF HILLOCKS PRIOR TO DIELECTRIC BARRIER DEPOSITION IN CU DAMASCENE
#6 | 2007-10-04Method to improve the step coverage and pattern loading for dielectric films
#7 | 2006-03-02Adhesion improvement for low k dielectrics to conductive materials
#8 | 2005-10-20Adhesion improvement for low k dielectrics to conductive materials
#9 | 2005-08-25Methods and apparatuses promoting adhesion of dielectric barrier film to copper
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