Tokyo
Japan
4
2010-03-04
The entities that hold a legal rights for patent applications filed by inventor Ichimura Teruhiko:
Teruhiko Ichimura from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
SUBSTRATE HOLDING APPARATUS AND POLISHING APPARATUS
#2 | 2008-05-22Substrate holding apparatus and polishing apparatus
#3 | 2006-05-11Substrate holding apparatus and polishing apparatus
#4 | 2005-05-19Substrate holding device and polishing device
3591484 ⎘