Eindhoven
Netherlands
25
2020-03-26
The entities that hold a legal rights for patent applications filed by inventor Van Eijk Jan:
Jan Van Eijk from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Y-theta table for semiconductor equipment
#2 | 2017-09-28Sensor, object positioning system, lithographic apparatus and device manufacturing method
#3 | 2017-07-27Control system, positioning system, lithographic apparatus, control method, device manufacturing method and control program
#4 | 2017-01-12Stage positioning system and lithographic apparatus
#5 | 2014-01-23Lithographic apparatus, and patterning device for use in a lithographic process
#6 | 2013-08-01System for detecting motion, lithographic apparatus and device manufacturing method
#7 | 2012-12-27Lithographic apparatus, method of deforming a substrate table and device manufacturing method
#8 | 2012-11-29Lithographic apparatus comprising a substrate table and a surface substrate actuator
#9 | 2012-09-27ARRANGEMENT FOR THE VIBRATION ISOLATION OF A PAY LOAD
#10 | 2012-08-23Electromagnetic actuator, stage apparatus and lithographic apparatus
#11 | 2011-10-06Suction unit and autonomous vacuum cleaner
#12 | 2011-03-31Positioning system and a method for positioning a substage with respect to a frame
#13 | 2011-02-03Positioning system, lithographic apparatus and method
#14 | 2011-01-13Lithographic apparatus and device manufacturing method
#15 | 2010-12-02LITHOGRAPHIC APPARATUS
#16 | 2010-06-24Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless
#17 | 2010-06-24Lithographic apparatus, and patterning device for use in a lithographic process
#18 | 2009-01-01Lithographic apparatus
#19 | 2009-01-01System for detecting motion of a body
#20 | 2008-08-28Displacement device
#21 | 2007-03-29Apparatus for processing an object with high position accurancy
#22 | 2005-09-13Lithographic apparatus and motor for use in the apparatus
#23 | 2005-07-21Lithographic apparatus
#24 | 2005-02-24Lithographic apparatus and device manufacturing method
#25 | 2005-01-20Masking device, lithographic apparatus, and device manufacturing method
362919 ⎘