Eindhoven
Netherlands
7
2024-04-18
The entities that hold a legal rights for patent applications filed by inventor Van Zutphen Tom:
Tom Van Zutphen from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
CHARGED PARTICLE APPARATUS AND METHOD
#2 | 2010-12-23Coil, positioning device, actuator, and lithographic apparatus
#3 | 2010-09-16Radiation source, lithographic apparatus, and device manufacturing method
#4 | 2010-02-11Optical position sensor, a position sensitive detector, a lithographic apparatus and a method for determining an absolute position of a movable object to be used in a relative position measurement system
#5 | 2009-01-15Lithographic apparatus and position sensor
#6 | 2008-11-13Lithographic apparatus and sensor calibration method
#7 | 2007-03-08Display device
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