Eindhoven
Netherlands
9
2010-09-30
The entities that hold a legal rights for patent applications filed by inventor Brinkhof Ralph:
Ralph Brinkhof from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Method for positioning a target portion of a substrate with respect to a focal plane of a projection system
#2 | 2008-06-26Method for positioning a target portion of a substrate with respect to a focal plane of a projection system
#3 | 2008-06-26Method for positioning a target portion of a substrate with respect to a focal plane of a projection system
#4 | 2008-02-21Method for determining a map, device manufacturing method, and lithographic apparatus
#5 | 2007-11-15Method for imaging a pattern onto a target portion of a substrate
#6 | 2006-09-26Assembly comprising a sensor for determining at least one of tilt and height of a substrate, a method therefor and a lithographic projection apparatus
#7 | 2006-06-01Using unflatness information of the substrate table or mask table for decreasing overlay
#8 | 2005-08-25Method for determining a map, device manufacturing method, and lithographic apparatus
#9 | 2005-06-23Method for determining a map, device manufacturing method, and lithographic apparatus
3659749 ⎘