San Jose, California
United States
15
2025-07-17
The entities that hold a legal rights for patent applications filed by inventor Savas Stephen E.:
Stephen E. Savas from San Jose, US has applied for patents for these inventions. The list has both pending applications and granted patents:
PULSING CONTROL MATCH NETWORK AND GENERATOR
#2 | 2024-05-02Inductive broad-band sensors for electromagnetic waves
#3 | 2021-07-22Pulsing control match network
#4 | 2021-07-15Inductive broad-band sensors for electromagnetic waves
#5 | 2021-07-15Sector shunts for plasma-based wafer processing systems
#6 | 2021-07-15Fast arc detecting match network
#7 | 2021-07-15Uniformity control for radio frequency plasma processing systems
#8 | 2021-07-15AZIMUTHAL SENSOR ARRAY FOR RADIO FREQUENCY PLASMA-BASED WAFER PROCESSING SYSTEMS
#9 | 2021-07-15Plasma non-uniformity detection
#10 | 2013-08-01SLOTTED ELECTROSTATIC SHIELD MODIFICATION FOR IMPROVED ETCH AND CVD PROCESS UNIFORMITY
#11 | 2007-06-19Slotted electrostatic shield modification for improved etch and CVD process uniformity
#12 | 2007-05-24Slotted electrostatic shield modification for improved etch and CVD process uniformity
#13 | 2006-03-02Substrate handling system and process for manufacturing large substrates
#14 | 2006-01-19Fast isotropic etching system and process for large, non-circular substrates
#15 | 2006-01-19Uniform etching system and process for large rectangular substrates
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