San Jose, California
United States
11
2020-03-26
The entities that hold a legal rights for patent applications filed by inventor EWERT Maurice E.:
Maurice E. EWERT from San Jose, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Cooled reflective adapter plate for a deposition chamber
#2 | 2013-10-31Cooled reflective adapter plate for a deposition chamber
#3 | 2013-10-17Off-angled heating of the underside of a substrate using a lamp assembly
#4 | 2013-08-01Off-angled heating of the underside of a substrate using a lamp assembly
#5 | 2012-09-13Off-angled heating of the underside of a substrate using a lamp assembly
#6 | 2010-09-30Mechanism for continuously varying radial position of a magnetron
#7 | 2010-02-11Method for ultra-uniform sputter deposition using simultaneous RF and DC power on target
#8 | 2009-12-17WAFER PROCESSING DEPOSITION SHIELDING COMPONENTS
#9 | 2009-12-17APPARATUS AND METHOD FOR UNIFORM DEPOSITION
#10 | 2006-04-13Magnetron having continuously variable radial position
#11 | 2005-09-29Selectable dual position magnetron
366089 ⎘