Roderick Koehle

City:

Ottobrunn

Country:

Germany

Published Applications:

Last publication date:

2010-10-21

Top Assignees for applications by Roderick Koehle

The entities that hold a legal rights for patent applications filed by inventor Koehle Roderick:

Roderick Koehle from Ottobrunn, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

Lithographic mask and method of forming a lithographic mask

Lithography systems and methods of manufacturing using thereof

Lithography Systems and Methods of Manufacturing Using Thereof

Method for inspection of periodic grating structures on lithography masks

Method for optimizing a photolithographic mask

Method for determining the construction of a mask for the micropatterning of semiconductor substrates by means of photolithography

Method for checking periodic structures on lithography masks

InventorID:

3675968 ⎘