Masahiro Numakura

City:

Nirasaki

Country:

Japan

Published Applications:

Last publication date:

2010-10-21

Top Assignees for applications by Masahiro Numakura

The entities that hold a legal rights for patent applications filed by inventor Numakura Masahiro:

Masahiro Numakura from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Substrate receiving method and controller

Control device and control method of plasma processing system, and storage medium storing control program

Cleaning method for substrate processing system, storage medium, and substrate processing system

InventorID:

3677156 ⎘