Eindhoven
Netherlands
21
2010-10-28
The entities that hold a legal rights for patent applications filed by inventor Bijvoet Dirk-Jan:
Dirk-Jan Bijvoet from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Lithographic apparatus having a substrate support with open cell plastic foam parts
#2 | 2010-05-27Lithographic apparatus and methods for compensating substrate unflatness, determining the effect of patterning device unflatness, and determining the effect of thermal loads on a patterning device
#3 | 2010-04-29Lithographic apparatus, device manufacturing method and position control method
#4 | 2009-09-17Lithographic apparatus having a chuck with a visco-elastic damping layer
#5 | 2009-06-11Servo control system, lithographic apparatus and control method
#6 | 2009-04-02Lithographic apparatus, stage apparatus and device manufacturing method
#7 | 2009-03-19Lithographic apparatus and exposure method
#8 | 2008-05-22Device manufacturing method, method for holding a patterning device and lithographic apparatus including an applicator for applying molecules onto a clamp area of a patterning device
#9 | 2008-01-17Lithographic apparatus and device manufacturing method
#10 | 2007-11-08Lithographic apparatus and device manufacturing method
#11 | 2007-10-04Lithographic Apparatus, Support, Device Manufacturing Method, and a Method of Supporting
#12 | 2007-08-09Lithographic apparatus and device manufacturing method
#13 | 2007-05-03Lithographic apparatus and device manufacturing method
#14 | 2006-12-28Lithographic apparatus and device manufacturing method
#15 | 2006-12-14Stage apparatus, lithographic apparatus and device manufacturing method
#16 | 2006-06-15System and method for an improved illumination system in a lithographic apparatus
#17 | 2006-03-30Lithographic apparatus and device manufacturing method
#18 | 2006-03-30Alignment system, alignment method, and lithographic apparatus
#19 | 2005-12-22Lithographic apparatus and device manufacturing method
#20 | 2005-12-22Lithographic apparatus and device manufacturing method
#21 | 2005-12-22Lithographic apparatus and device manufacturing method
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