Santa Clara, California
United States
8
2010-02-11
The entities that hold a legal rights for patent applications filed by inventor Perlov Ilya:
Ilya Perlov from Santa Clara, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion
#2 | 2007-10-11Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion
#3 | 2006-08-31Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion
#4 | 2006-08-29Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion
#5 | 2006-04-06Apparatus for storing and moving a cassette
#6 | 2005-06-30Method of controlling carrier head with multiple chambers
#7 | 2005-05-24Method of controlling carrier head with multiple chambers
#8 | 2005-03-03Polishing apparatus having a trough
3752666 ⎘