Koshi-Shi
Japan
8
2014-08-21
The entities that hold a legal rights for patent applications filed by inventor DOUKI Yuichi:
Yuichi DOUKI from Koshi-Shi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Thermal processing apparatus for thermal processing substrate and positioning method of positioning substrate transfer position
#2 | 2013-08-08Substrate processing apparatus, substrate processing method and non-transitory storage medium
#3 | 2012-09-06Substrate holder positioning method and substrate processing system
#4 | 2012-06-14SUBSTRATE TRANSFER APPARATUS, SUBSTRATE PROCESS SYSTEM, AND SUBSTRATE TRANSFER METHOD
#5 | 2012-03-15Coating and developing apparatus, coating and developing method and non-transitory tangible medium
#6 | 2012-03-08Coating and developing apparatus, coating and developing method and non-transitory tangible medium
#7 | 2011-08-04SUBSTRATE CARRYING DEVICE, SUBSTRATE CARRYING METHOD AND STORAGE MEDIUM
#8 | 2007-11-29Substrate transfer apparatus, substrate process system, and substrate transfer method
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