Munich
Germany
13
2012-06-28
The entities that hold a legal rights for patent applications filed by inventor Schoen Florian:
Florian Schoen from Munich, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Methods of manufacture MEMS devices
#2 | 2012-05-03MEMS device
#3 | 2012-01-19MEMS resonator devices
#4 | 2011-06-02Silicon MEMS resonators
#5 | 2010-12-02Resonance frequency tunable MEMS device
#6 | 2010-12-02MEMS devices and methods of manufacture thereof
#7 | 2010-07-15MEMS resonator devices with a plurality of mass elements formed thereon
#8 | 2010-03-25Wafer level packaged MEMS integrated circuit
#9 | 2010-02-25Silicon MEMS resonator devices and methods
#10 | 2010-02-11Passive temperature compensation of silicon MEMS devices
#11 | 2010-01-21MEMS substrates, devices, and methods of manufacture thereof
#12 | 2009-12-03Silicon MEMS resonators
#13 | 2009-07-16MEMS devices and methods of manufacture thereof
3767457 ⎘