United States
5
2013-08-29
The entities that hold a legal rights for patent applications filed by inventor GIGAPHOTON INC.:
GIGAPHOTON INC. from , US has applied for patents for these inventions. The list has both pending applications and granted patents:
Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus
#2 | 2013-08-29Target supply device, extreme ultraviolet light generation apparatus, and method for supplying target
#3 | 2013-08-15Target supply apparatus and target supply method
#4 | 2013-08-15Excimer laser and laser device
#5 | 2013-08-15Target supply device
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