Sunnyvale, California
United States
12
2009-01-08
The entities that hold a legal rights for patent applications filed by inventor KELLER ERNST:
ERNST KELLER from Sunnyvale, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Diffuser gravity support
#2 | 2008-05-01Suspension for showerhead in process chamber
#3 | 2008-05-01Gas sealing skirt for suspended showerhead in process chamber
#4 | 2007-02-22Dog leash and control apparatus
#5 | 2006-10-19RF current return path for a large area substrate plasma reactor
#6 | 2006-08-01RF current return path for a large area substrate plasma reactor
#7 | 2006-03-28Suspended gas distribution plate
#8 | 2006-03-23Diffuser gravity support
#9 | 2006-03-16PECVD susceptor support construction
#10 | 2006-01-19Shadow frame with mask panels
#11 | 2005-05-24Susceptor shaft vacuum pumping
#12 | 2005-01-06Suspended gas distribution manifold for plasma chamber
3848549 ⎘