Deurne
Netherlands
2
2009-08-13
The entities that hold a legal rights for patent applications filed by inventor Franken Robert:
Robert Franken from Deurne, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Method for determining exposure settings, lithographic exposure apparatus, computer program and data carrier
#2 | 2009-01-22Inspection method and apparatus lithographic apparatus, lithographic processing cell, device manufacturing method and distance measuring system
3861152 ⎘