Gyeonggi-do
South Korea
4
2009-01-29
The entities that hold a legal rights for patent applications filed by inventor AHN Yo-Han:
Yo-Han AHN from Gyeonggi-do, KR has applied for patents for these inventions. The list has both pending applications and granted patents:
Air filtering device and cleaning system of semiconductor manufacturing apparatus with the same
#2 | 2008-08-21Contamination analysis unit and method thereof, and reticle cleaning system
#3 | 2008-01-17Heat treatment equipment
#4 | 2007-02-22Apparatus and method for collecting contaminants from an air flow for manufacturing semiconductor devices and system using the same
3864649 ⎘