Fremont, California
United States
9
2009-02-05
The entities that hold a legal rights for patent applications filed by inventor RASHEED MUHAMMAD:
MUHAMMAD RASHEED from Fremont, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Method for refurbishing an electrostatic chuck with reduced plasma penetration and arcing
#2 | 2009-02-05Method of making an electrostatic chuck with reduced plasma penetration and arcing
#3 | 2009-02-05Method and apparatus for providing an electrostatic chuck with reduced plasma penetration and arcing
#4 | 2009-01-29HIGH PROFILE MINIMUM CONTACT PROCESS KIT FOR HDP-CVD APPLICATION
#5 | 2008-08-07INTERNAL BALANCED COIL FOR INDUCTIVELY COUPLED HIGH DENSITY PLASMA PROCESSING CHAMBER
#6 | 2008-08-07Internal balanced coil for inductively coupled high density plasma processing chamber
#7 | 2008-08-07Internal balanced coil for inductively coupled high density plasma processing chamber
#8 | 2007-03-01Gas delivery system for semiconductor processing
#9 | 2006-11-28Gas delivery system for semiconductor processing
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