Tokyo
Japan
9
2009-08-25
The entities that hold a legal rights for patent applications filed by inventor Katakabe Ichiro:
Ichiro Katakabe from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Apparatus for and method of processing substrate
#2 | 2009-01-29Revolution member supporting apparatus and semiconductor substrate processing apparatus
#3 | 2008-05-15Substrate Processing Apparatus and Method
#4 | 2008-01-24Apparatus for cleaning a substrate having metal interconnects
#5 | 2007-12-18Substrate processing method
#6 | 2007-05-24Revolution member supporting apparatus and semiconductor substrate processing apparatus
#7 | 2006-10-19Substrate processing apparatus, substrate processing method, and substrate holding apparatus
#8 | 2005-07-26Revolution member supporting apparatus and semiconductor substrate processing apparatus
#9 | 2005-04-28Revolution member supporting apparatus and semiconductor substrate processing apparatus
3865144 ⎘