Beaverton, Oregon
United States
7
2022-10-13
The entities that hold a legal rights for patent applications filed by inventor Smith Nigel P.:
Nigel P. Smith from Beaverton, US has applied for patents for these inventions. The list has both pending applications and granted patents:
MULTI-LAYER CALIBRATION FOR EMPIRICAL OVERLAY MEASUREMENT
#2 | 2021-03-25Sample surface polarization modification in interferometric defect inspection
#3 | 2020-04-02Interferometer with pixelated phase shift mask
#4 | 2019-10-03Sample inspection using topography
#5 | 2019-06-06Sub-resolution defect detection
#6 | 2018-06-07Scanning white-light interferometry system for characterization of patterned semiconductor features
#7 | 2013-08-15Image based overlay measurement with finite gratings
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