Mountain View, California
United States
3
2009-03-26
The entities that hold a legal rights for patent applications filed by inventor Stein Nathan D.:
Nathan D. Stein from Mountain View, US has applied for patents for these inventions. The list has both pending applications and granted patents:
SINGLE WAFER METHOD AND APPARATUS FOR DRYING SEMICONDUCTOR SUBSTRATES USING AN INERT GAS AIR-KNIFE
#2 | 2009-02-19Single wafer apparatus for drying semiconductor substrates using an inert gas air-knife
#3 | 2009-02-05SINGLE WAFER METHOD AND APPARATUS FOR DRYING SEMICONDUCTOR SUBSTRATES USING AN INERT GAS AIR-KNIFE
3870380 ⎘