Eindhoven
Netherlands
3
2009-02-26
The entities that hold a legal rights for patent applications filed by inventor De Laak Ron Van:
Ron Van De Laak from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus
#2 | 2006-03-23Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus
#3 | 2006-03-16Method and apparatus for vibration detection, method and apparatus for vibration analysis, lithographic apparatus, device manufacturing method, and computer program
3887535 ⎘