Mountain View, California
United States
9
2009-02-26
The entities that hold a legal rights for patent applications filed by inventor Yim Kang Sub:
Kang Sub Yim from Mountain View, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Low dielectric (low k) barrier films with oxygen doping by plasma-enhanced chemical vapor deposition (PECVD)
#2 | 2006-11-02Low dielectric (low k) barrier films with oxygen doping by plasma-enhanced chemical vapor deposition (PECVD)
#3 | 2006-07-06Method and apparatus for deposition of low dielectric constant materials
#4 | 2006-06-13Method for forming ultra low k films using electron beam
#5 | 2006-03-07Method and apparatus for deposition of low dielectric constant materials
#6 | 2006-01-10Ultra low k plasma CVD nanotube/spin-on dielectrics with improved properties for advanced nanoelectronic device fabrication
#7 | 2005-07-14Method for forming ultra low k films using electron beam
#8 | 2005-06-16Low dielectric (low k) barrier films with oxygen doping by plasma-enhanced chemical vapor deposition (PECVD)
#9 | 2005-01-04Method for producing semiconductor including forming a layer containing at least silicon carbide and forming a second layer containing at least silicon oxygen carbide
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