Pacifica, California
United States
8
2009-03-05
The entities that hold a legal rights for patent applications filed by inventor Glenn Walter Benjamin:
Walter Benjamin Glenn from Pacifica, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Apparatus for cyclical depositing of thin films
#2 | 2007-05-03APPARATUS FOR CYCLICAL DEPOSITING OF THIN FILMS
#3 | 2007-02-13Apparatus for cyclical deposition of thin films
#4 | 2006-03-16Methods and apparatus for forming barrier layers in high aspect ratio vias
#5 | 2005-12-13Methods and apparatus for forming barrier layers in high aspect ratio vias
#6 | 2005-12-01Methods and apparatus for forming barrier layers in high aspect ratio vias
#7 | 2005-06-30Clamshell and small volume chamber with fixed substrate support
#8 | 2005-03-15Clamshell and small volume chamber with fixed substrate support
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