Eindhoven
Netherlands
5
2009-03-12
The entities that hold a legal rights for patent applications filed by inventor Mos Everhardus Cornelis:
Everhardus Cornelis Mos from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Method for producing a marker on a substrate, lithographic apparatus and device manufacturing method
#2 | 2006-09-26Device inspection method and apparatus using an asymmetric marker
#3 | 2006-04-18Lithographic apparatus, device manufacturing method, and device manufactured thereby
#4 | 2006-01-12Method for producing a marker on a substrate, lithographic apparatus and device manufacturing method
#5 | 2005-04-12Alignment system for lithographic apparatus for measuring a position of an alignment mark
3899684 ⎘