United States
9
2014-02-06
The entities that hold a legal rights for patent applications filed by inventor EBARA CORPORATION:
EBARA CORPORATION from , US has applied for patents for these inventions. The list has both pending applications and granted patents:
Inspection system by charged particle beam and method of manufacturing devices using the system
#2 | 2014-01-02Polishing pad and chemical mechanical polishing apparatus for polishing a workpiece, and method of polishing a workpiece using the chemical mechanical polishing apparatus
#3 | 2013-12-26Polishing apparatus and polishing method
#4 | 2013-08-29Substrate cleaning apparatus and substrate cleaning method
#5 | 2013-08-29SUBSTRATE PROCESSING METHOD
#6 | 2013-08-29Substrate cleaning method
#7 | 2013-08-29Substrate drying apparatus, substrate drying method and control program
#8 | 2013-08-22Substrate processing apparatus and substrate processing method
#9 | 2013-08-15Polishing apparatus
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