Jun Sato

City:

Kai-shi

Country:

Japan

Published Applications:

Last publication date:

2009-03-26

Top Assignees for applications by Jun Sato

The entities that hold a legal rights for patent applications filed by inventor Sato Jun:

Jun Sato from Kai-shi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Vertical plasma processing apparatus for semiconductor process

VERTICAL PLASMA PROCESSING APPARATUS FOR SEMICONDUCTOR PROCESS

Method and apparatus for forming silicon-containing insulating film

InventorID:

3908941 ⎘