Marblehead, Massachusetts
United States
19
2009-04-16
The entities that hold a legal rights for patent applications filed by inventor MOROZ Paul:
Paul MOROZ from Marblehead, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Method and apparatus for temperature change and control
#2 | 2008-03-13Radial line slot antenna having a conductive layer
#3 | 2008-03-13Electron beam enhanced surface wave plasma source
#4 | 2007-06-14Plasma chamber wall segment temperature control
#5 | 2007-05-24Plasma chamber wall segment temperature control
#6 | 2007-05-24Plasma chamber wall segment temperature control
#7 | 2007-04-05Method and apparatus for measuring plasma density in processing reactors using a short dielectric cap
#8 | 2007-04-05Method and apparatus for measuring plasma density in processing reactors using a long dielectric tube
#9 | 2007-03-06Plasma chamber wall segment temperature control
#10 | 2006-11-16Intelligent system for detection of process status, process fault and preventive maintenance
#11 | 2006-09-19Method and apparatus for reducing substrate charging damage
#12 | 2006-07-11Apparatus and method for determining clamping status of semiconductor wafer
#13 | 2006-04-20Method and system for arc suppression in a plasma processing system
#14 | 2006-03-23Plasma processing system and method
#15 | 2006-02-09Method and system for substrate temperature profile control
#16 | 2005-10-20Method and apparatus for temperature change and control
#17 | 2005-09-29Method and apparatus for rapid temperature change and control
#18 | 2005-03-31Method and apparatus for efficient temperature control using a contact volume
#19 | 2005-03-22Branching RF antennas and plasma processing apparatus
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