Richardson, Texas
United States
9
2010-05-11
The entities that hold a legal rights for patent applications filed by inventor LAM Hieu A.:
Hieu A. LAM from Richardson, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Process system health index and method of using the same
#2 | 2009-12-17METHOD OF DOUBLE PATTERNING USING SACRIFICIAL STRUCTURE
#3 | 2009-04-16Method and system for predicting process performance using material processing tool and sensor data
#4 | 2006-03-09Method and apparatus for determining an etch property using an endpoint signal
#5 | 2005-12-22Method and apparatus for using a pressure control system to monitor a plasma processing system
#6 | 2005-11-17Method and system for predicting process performance using material processing tool and sensor data
#7 | 2005-10-20Controlling a material processing tool and performance data
#8 | 2005-09-29Method and system of discriminating substrate type
#9 | 2005-01-20Method for automatic configuration of processing system
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