Solms
Germany
3
2009-05-21
The entities that hold a legal rights for patent applications filed by inventor Pietsch Katrin:
Katrin Pietsch from Solms, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Device for measuring the position of at least one structure on a substrate
#2 | 2009-05-21Apparatus and method for supporting a substrate at a position with high precision
#3 | 2009-04-30Method for determining positions of structures on a substrate
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