Shahid Rauf

City:

Country:

United States

Published Applications:

Last publication date:

2009-06-25

Top Assignees for applications by Shahid Rauf

The entities that hold a legal rights for patent applications filed by inventor Rauf Shahid:

Shahid Rauf from , US has applied for patents for these inventions. The list has both pending applications and granted patents:

Plasma reactor gas distribution plate having path splitting manifold side-by-side with showerhead

Plasma reactor gas distribution plate having a vertically stacked path splitting manifold

Plasma reactor gas distribution plate with radially distributed path splitting manifold

Plasma reactor gas distribution plate having a path splitting manifold immersed within a showerhead

Gas distribution plate with annular plenum having a sloped ceiling for uniform distribution

Method and apparatus for removing polymer from the wafer backside and edge

Multiple frequency pulsing of multiple coil source to control plasma ion density radial distribution

InventorID:

3957957 ⎘