Peter L. Kellerman

APPARATUS FOR FORMING CRYSTALLINE SHEET FROM A MELT

Method for controlling heat flow within a silicon melt using a heat diffusion barrier assembly

Apparatus for controlling heat flow within a silicon melt

Apparatus and method for controlling ion beam properties using energy filter

Method for achieving sustained anisotropic crystal growth on the surface of a silicon melt

Apparatus and method for crystalline sheet growth

System and method for crystalline sheet growth using a cold block and gas jet

SYSTEM FOR MEASURING MATERIAL THICKNESSES AT HIGH TEMPERATURES

Liquid immersion doping

Apparatus for forming crystalline sheet from a melt

Apparatus and method for monitoring and controlling thickness of a crystalline layer

Apparatus and method for controlling thickness of a crystalline sheet grown on a melt

Apparatus for processing a melt

METHOD FOR ACHIEVING SUSTAINED ANISOTROPIC CRYSTAL GROWTH ON THE SURFACE OF A MELT

Sheet production apparatus for removing a crystalline sheet from the surface of a melt using gas jets located above and below the crystalline sheet

APPARATUS FOR FLOAT GROWN CRYSTALLINE SHEETS

METHOD FOR ACHIEVING SUSTAINED ANISOTROPIC CRYSTAL GROWTH ON THE SURFACE OF A MELT

Method for achieving sustained anisotropic crystal growth on the surface of a silicon melt

Method and apparatus for controlling an asymmetric electrostatic lens about a central ray trajectory of an ion beam

Removing a sheet from the surface of a melt using elasticity and buoyancy

Removal of a sheet from a production apparatus

Removing a sheet from the surface of a melt using gas jets

Gas-lift pumps for flowing and purifying molten silicon

System and method for controlling deflection of a charged particle beam within a graded electrostatic lens

Floating sheet production apparatus and method

METHOD AND APPARATUS FOR PRODUCING A DISLOCATION-FREE CRYSTALLINE SHEET

Removal of a sheet from a production apparatus

Techniques for independently controlling deflection, deceleration and focus of an ion beam

Melt purification and delivery system

Method of controlling a thickness of a sheet formed from a melt

Method for continuous formation of a purified sheet from a melt

Method and apparatus for producing a dislocation-free crystalline sheet

Floating sheet production apparatus and method

Floating sheet measurement apparatus and method

TECHNIQUES FOR SHAPING AN ION BEAM

TECHNIQUES FOR MEASURING AND CONTROLLING ION BEAM ANGLE AND DENSITY UNIFORMITY

Methods and systems for trapping ion beam particles and focusing an ion beam

Electromagnet with active field containment

Architecture for ribbon ion beam ion implanter system

Technique for shaping a ribbon-shaped ion beam

Segmented resonant antenna for radio frequency inductively coupled plasmas

High-performance electrostatic clamp comprising a resistive layer, micro-grooves, and dielectric layer

Ion beam scanning control methods and systems for ion implantation uniformity

Gas-cooled clamp for RTP

Systems and methods for ion beam focusing

Wafer scanning system with reciprocating rotary motion utilizing springs and counterweights

Method of making a MEMS electrostatic chuck

System and method for performing SIMOX implants using an ion shower

Segmented resonant antenna for radio frequency inductively coupled plasmas

MEMS based contact conductivity electrostatic chuck

Clamping and de-clamping semiconductor wafers on a J-R electrostatic chuck having a micromachined surface by using force delay in applying a single-phase square wave AC clamping voltage

Clamping and de-clamping semiconductor wafers on an electrostatic chuck using wafer inertial confinement by applying a single-phase square wave AC clamping voltage

MEMS based multi-polar electrostatic chuck