Santa Clara, California
United States
4
2009-06-04
The entities that hold a legal rights for patent applications filed by inventor Moorthy Madhu:
Madhu Moorthy from Santa Clara, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Ruthenium or cobalt as an underlayer for tungsten film deposition
#2 | 2008-11-13Methods for depositing tungsten layers employing atomic layer deposition techniques
#3 | 2006-06-15Ruthenium as an underlayer for tungsten film deposition
#4 | 2006-01-12Methods for depositing tungsten layers employing atomic layer deposition techniques
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