United States
3
2009-06-18
The entities that hold a legal rights for patent applications filed by inventor Belen Rodolfo P.:
Rodolfo P. Belen from , US has applied for patents for these inventions. The list has both pending applications and granted patents:
Method of controlling CD bias and CD microloading by changing the ceiling-to-wafer gap in a plasma reactor
#2 | 2009-06-04Gate profile control through effective frequency of dual HF/VHF sources in a plasma etch process
#3 | 2008-06-26Plasma etch process for controlling line edge roughness
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