Aurora, Illinois
United States
4
2009-06-18
The entities that hold a legal rights for patent applications filed by inventor Feeney Paul:
Paul Feeney from Aurora, US has applied for patents for these inventions. The list has both pending applications and granted patents:
COMPOSITIONS AND METHODS FOR CMP OF SEMICONDUCTOR MATERIALS
#2 | 2008-06-12Compositions for polishing aluminum/copper and titanium in damascene structures
#3 | 2008-05-15Composition and method for damascene CMP
#4 | 2007-08-02Compositions and methods for CMP of phase change alloys
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