Mountain View, California
United States
6
2009-08-13
The entities that hold a legal rights for patent applications filed by inventor Brown Karl:
Karl Brown from Mountain View, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Detachable electrostatic chuck for supporting a substrate in a process chamber
#2 | 2009-04-07Flat style coil for improved precision etch uniformity
#3 | 2008-11-13Substrate cleaning chamber and cleaning and conditioning methods
#4 | 2008-06-19Non-contact process kit
#5 | 2006-01-05Detachable electrostatic chuck for supporting a substrate in a process chamber
#6 | 2005-10-06Detachable electrostatic chuck
4003090 ⎘