Gilbert, Arizona
United States
3
2009-09-03
The entities that hold a legal rights for patent applications filed by inventor HIAR Todd David:
Todd David HIAR from Gilbert, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Lithographic apparatus and device manufacturing method with radiation beam inspection using moveable reflecting device
#2 | 2007-03-01Lithographic apparatus and device manufacturing method that compensates for reticle induced CDU
#3 | 2006-09-28Reduced pitch multiple exposure process
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