Nirasaki-City
Japan
3
2013-01-17
The entities that hold a legal rights for patent applications filed by inventor Itoh Hitoshi:
Hitoshi Itoh from Nirasaki-City, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Film forming method and film forming apparatus
#2 | 2012-07-19Dry cleaning method of substrate processing apparatus
#3 | 2012-03-22Plasma generating apparatus, plasma processing apparatus and plasma processing method
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