Miyagi
Japan
8
2019-03-28
The entities that hold a legal rights for patent applications filed by inventor ITO Etsuji:
Etsuji ITO from Miyagi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Plasma processing apparatus
#2 | 2018-12-27Power feed member and substrate processing apparatus
#3 | 2018-04-26Semiconductor manufacturing device and processing method
#4 | 2017-06-08Substrate processing method
#5 | 2017-04-13Plasma etching method
#6 | 2014-07-31Semiconductor manufacturing device and processing method
#7 | 2014-07-24Etching method of multilayer film
#8 | 2013-08-29Substrate processing apparatus
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