DAVID P. SUN

City:

Mountain View, California

Country:

United States

Published Applications:

Last publication date:

2008-01-03

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DAVID P. SUN from Mountain View, US has applied for patents for these inventions. The list has both pending applications and granted patents:

GAS FLOW CONTROL BY DIFFERENTIAL PRESSURE MEASUREMENTS

Gas baffle and distributor for semiconductor processing chamber

Side RF coil and side heater for plasma processing apparatus

Anti-clogging nozzle for semiconductor processing

InventorID:

4084719 ⎘