Cupertino, California
United States
15
2008-02-14
The entities that hold a legal rights for patent applications filed by inventor Stanke Fred E.:
Fred E. Stanke from Cupertino, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Polarimetric scatterometry methods for critical dimension measurements of periodic structures
#2 | 2007-03-22Small-spot spectrometry instrument with reduced polarization and multiple-element depolarizer therefor
#3 | 2006-09-07Small-spot spectrometry instrument with reduced polarization and multiple-element depolarizer therefor
#4 | 2006-08-29Small-spot spectrometry instrument with reduced polarization and multiple-element depolarizer therefor
#5 | 2006-05-09Apparatus for imaging metrology
#6 | 2005-12-22Database interpolation method for optical measurement of diffractive microstructures
#7 | 2005-09-27Database interpolation method for optical measurement of diffractive microstructures
#8 | 2005-08-11Polarimetric scatterometry methods for critical dimension measurements of periodic structures
#9 | 2005-07-19Wafer metrology apparatus and method
#10 | 2005-06-21Polarimetric scatterometry methods for critical dimension measurements of periodic structures
#11 | 2005-06-16Apparatus for imaging metrology
#12 | 2005-03-22Accurate small-spot spectrometry systems and methods
#13 | 2005-03-17Method of measuring meso-scale structures on wafers
#14 | 2005-02-01Optimized aperture shape for optical CD/profile metrology
#15 | 2005-01-27Overlay alignment metrology using diffraction gratings
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