Eindhoven
Netherlands
7
2008-02-21
The entities that hold a legal rights for patent applications filed by inventor Greve Peter Ferdinand:
Peter Ferdinand Greve from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Particle detection system, and lithographic apparatus provided with such particle detection system
#2 | 2007-03-15Method of and apparatus for determining focus of an imaging system
#3 | 2006-11-16Spectroscopic analysis apparatus and method with excitation system and focus monitoring system
#4 | 2006-06-27Output stabilization for a laser matrix
#5 | 2006-04-06Particle detection device, lithographic apparatus and device manufacturing method
#6 | 2006-04-06Particle detection device, lithographic apparatus and device manufacturing method
#7 | 2006-03-16Machine suitable for placing a component on a substrate, as well as a method therefor
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