Austin, Texas
United States
5
2008-12-02
The entities that hold a legal rights for patent applications filed by inventor Emami Iraj:
Iraj Emami from Austin, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Scanner optimization for reduced across-chip performance variation through non-contact electrical metrology
#2 | 2008-03-06Transistor gate shape metrology using multiple data sources
#3 | 2008-02-19Optimizing critical dimension uniformity utilizing a resist bake plate simulator
#4 | 2007-05-22Composite alignment mark scheme for multi-layers in lithography
#5 | 2007-01-02Real time immersion medium control using scatterometry
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