Peter Deufel

City:

Konigsbronn

Country:

Germany

Published Applications:

Last publication date:

2008-03-27

Top Assignees for applications by Peter Deufel

The entities that hold a legal rights for patent applications filed by inventor Deufel Peter:

Peter Deufel from Konigsbronn, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

Lithographic apparatus and method

Lithographic apparatus, device manufacturing method and exchangeable optical element

InventorID:

4144956 ⎘