Robert KEVWITCH

City:

Chandler, Arizona

Country:

United States

Published Applications:

Last publication date:

2008-03-27

Top Assignees for applications by Robert KEVWITCH

The entities that hold a legal rights for patent applications filed by inventor KEVWITCH Robert:

TOKYO ELECTRON LIMITED 6 Tokyo, Japan
TOKYO ELECTRON LIMITED 1 Minato-ku, Japan

Recent patent applications by KEVWITCH Robert

Robert KEVWITCH from Chandler, US has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2008-03-27

US20080076262A1

Electricity

METHOD AND SYSTEM FOR TREATING A DIELECTRIC FILM

#2 | 2006-11-16

US20060255012A1

Electricity

REMOVAL OF PARTICLES FROM SUBSTRATE SURFACES USING SUPERCRITICAL PROCESSING

#3 | 2006-11-16

US20060254615A1

Electricity

Treatment of substrate using functionalizing agent in supercritical carbon dioxide

#4 | 2006-10-05

US20060223899A1

Electricity

Removal of porogens and porogen residues using supercritical CO2

#5 | 2006-08-24

US20060186088A1

Chemistry; metallurgy

Etching and cleaning BPSG material using supercritical processing

#6 | 2006-08-17

US20060180572A1

Performing operations; transporting

REMOVAL OF POST ETCH RESIDUE FOR A SUBSTRATE WITH OPEN METAL SURFACES

#7 | 2006-08-17

US20060180174A1

Electricity

METHOD AND SYSTEM FOR TREATING A SUBSTRATE WITH A HIGH PRESSURE FLUID USING A PEROXIDE-BASED PROCESS CHEMISTRY IN CONJUNCTION WITH AN INITIATOR

#8 | 2006-05-18

US20060102591A1

Electricity

Method and system for treating a substrate using a supercritical fluid

#9 | 2006-05-18

US20060102590A1

Chemistry; metallurgy

METHOD FOR TREATING A SUBSTRATE WITH A HIGH PRESSURE FLUID USING A PREOXIDE-BASED PROCESS CHEMISTRY

#10 | 2005-09-29

US20050215072A1

Electricity

Method and system for treating a dielectric film

InventorID:

4146874 ⎘