Inventor profile of:

Kun Xu

City:

Sunol, California

Country:

United States

Published Applications:

58

Last publication date:

2026-04-16

Top Assignees for applications by Kun Xu

The entities that hold a legal rights for patent applications filed by inventor Xu Kun:

Recent patent applications by Xu Kun

Kun Xu from Sunol, US has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2026-04-16
US20260102870A1
Performing operations; transporting

COMPENSATION FOR SLURRY COMPOSITION IN IN-SITU ELECTROMAGNETIC INDUCTIVE MONITORING

#2 | 2026-03-05
US20260068603A1
Electricity

USING SIGNAL MINIMA IN EDDY CURRENT MONITORING

#3 | 2026-03-05
US20260061545A1
Performing operations; transporting

PLATEN WITH MULTIPLE SENSORS FOR EDDY CURRENT MONITORING

#4 | 2026-01-15
US20260014663A1
Performing operations; transporting

COMPENSATION FOR SUBSTRATE DOPING IN EDGE RECONSTRUCTION FOR IN-SITU ELECTROMAGNETIC INDUCTIVE MONITORING

#5 | 2026-01-08
US20260008149A1
Performing operations; transporting

POLISHING APPARATUS USING NEURAL NETWORK FOR MONITORING

#6 | 2025-10-23
US20250326084A1
Performing operations; transporting

EDDY CURRENT MONITORING TO DETECT VIBRATION IN POLISHING

#7 | 2025-08-21
US20250262714A1
Performing operations; transporting

GENERATION OF BACKGROUND SIGNAL SEQUENCE USING AN IN-SITU MONITORING SYSTEM IN CHEMICAL MECHANICAL POLISHING

#8 | 2025-08-21
US20250262713A1
Performing operations; transporting

PROCESSING OF SIGNALS FROM AN IN-SITU MONITORING SYSTEM IN CHEMICAL MECHANICAL POLISHING

#9 | 2025-08-21
US20250262712A1
Performing operations; transporting

PROCESSING OF SCALED SIGNALS FROM IN-SITU MONITORING SYSTEM IN CHEMICAL MECHANICAL POLISHING

#10 | 2025-08-21
US20250262711A1
Performing operations; transporting

PROCESSING OF SIGNALS FROM IN-SITU MONITORING SYSTEM IN CHEMICAL MECHANICAL POLISHING

#11 | 2025-08-14
US20250256373A1
Performing operations; transporting

Generation of Starting Thickness Profile Using In-SITU Monitoring System

#12 | 2025-08-14
US20250256372A1
Performing operations; transporting

MULTI-ZONE PROFILE CONTROL FOR INCONSISTENT UNDERLAYER

#13 | 2025-08-14
US20250256371A1
Performing operations; transporting

ENDPOINT CONTROL FOR INCONSISTENT UNDERLAYER

#14 | 2024-04-18
US20240123565A1
Performing operations; transporting

COMPENSATION FOR SLURRY COMPOSITION IN IN-SITU ELECTROMAGNETIC INDUCTIVE MONITORING

#15 | 2024-04-11
US20240116152A1
Performing operations; transporting

SWITCHING CONTROL ALGORITHMS ON DETECTION OF EXPOSURE OF UNDERLYING LAYER DURING POLISHING

#16 | 2024-01-11
US20240014080A1
Electricity

Technique for training neural network for use in in-situ monitoring during polishing and polishing system

#17 | 2023-12-07
US20230390883A1
Performing operations; transporting

ACOUSTIC MONITORING OF CMP RETAINING RING

#18 | 2023-11-30
US20230381912A1
Performing operations; transporting

Determination of substrate layer thickness with polishing pad wear compensation

#19 | 2023-09-14
US20230290691A1
Electricity

Trained neural network in in-situ monitoring during polishing and polishing system

#20 | 2023-09-14
US20230286107A1
Performing operations; transporting

EDDY CURRENT MONITORING TO DETECT VIBRATION IN POLISHING

#21 | 2023-07-06
US20230213324A1
Physics

Core configuration for in-situ electromagnetic induction monitoring system

#22 | 2023-03-23
US20230085787A1
Performing operations; transporting

POLISHING APPARATUS USING MACHINE LEARNING AND COMPENSATION FOR PAD THICKNESS

#23 | 2022-06-16
US20220184770A1
Performing operations; transporting

Compensation for slurry composition in in-situ electromagnetic inductive monitoring

#24 | 2022-02-10
US20220043095A1
Physics

Resistivity-based adjustment of thresholds for in-situ monitoring

#25 | 2021-12-30
US20210402551A1
Performing operations; transporting

Determination of substrate layer thickness with polishing pad wear compensation

#26 | 2021-12-09
US20210379724A1
Performing operations; transporting

Switching control algorithms on detection of exposure of underlying layer during polishing

#27 | 2021-12-09
US20210379723A1
Performing operations; transporting

COMPENSATION FOR SUBSTRATE DOPING IN EDGE RECONSTRUCTION FOR IN-SITU ELECTROMAGNETIC INDUCTIVE MONITORING

#28 | 2021-12-09
US20210379722A1
Performing operations; transporting

Profile control with multiple instances of contol algorithm during polishing

#29 | 2021-12-09
US20210379721A1
Performing operations; transporting

PROFILE CONTROL DURING POLISHING OF A STACK OF ADJACENT CONDUCTIVE LAYERS

#30 | 2021-11-18
US20210358819A1
Electricity

Using a trained neural network for use in in-situ monitoring during polishing and polishing system

#31 | 2021-11-18
US20210354265A1
Performing operations; transporting

Technique for training neural network for use in in-situ monitoring during polishing and polishing system

#32 | 2021-07-29
US20210229234A1
Performing operations; transporting

POLISHING APPARATUS USING NEURAL NETWORK FOR MONITORING

#33 | 2019-12-26
US20190390949A1
Physics

METHODS, APPARATUSES AND SYSTEMS FOR CONDUCTIVE FILM LAYER THICKNESS MEASUREMENTS

#34 | 2019-12-26
US20190389028A1
Performing operations; transporting

Compensation for substrate doping for in-situ electromagnetic inductive monitoring

#35 | 2019-11-28
US20190358770A1
Performing operations; transporting

Core configuration for in-situ electromagnetic induction monitoring system

#36 | 2019-10-03
US20190299356A1
Performing operations; transporting

Polishing apparatus using machine learning and compensation for pad thickness

#37 | 2019-05-09
US20190134775A1
Performing operations; transporting

Determination of gain for eddy current sensor

#38 | 2019-03-21
US20190084119A1
Performing operations; transporting

Chattering correction for accurate sensor position determination on wafer

#39 | 2018-10-25
US20180304435A1
Performing operations; transporting

Polishing apparatus using neural network for monitoring

#40 | 2018-07-19
US20180203090A1
Physics

Resistivity-based calibration of in-situ electromagnetic inductive monitoring

#41 | 2018-07-19
US20180203089A1
Physics

Resistivity-based adjustment of measurements from in-situ monitoring

#42 | 2018-05-03
US20180122667A1
Electricity

Core configuration with alternating posts for in-situ electromagnetic induction monitoring system

#43 | 2018-04-26
US20180111251A1
Performing operations; transporting

Core configuration for in-situ electromagnetic induction monitoring system

#44 | 2018-04-12
US20180099374A1
Performing operations; transporting

Real time profile control for chemical mechanical polishing

#45 | 2018-03-22
US20180079052A1
Performing operations; transporting

Endpoint detection with compensation for filtering

#46 | 2016-06-09
US20160158908A1
Performing operations; transporting

Determination of gain for eddy current sensor

#47 | 2015-08-13
US20150224623A1
Performing operations; transporting

Adjusting eddy current measurements

#48 | 2015-04-30
US20150118766A1
Electricity

Determination of gain for eddy current sensor

#49 | 2015-04-30
US20150118765A1
Electricity

Determination of gain for eddy current sensor

#50 | 2014-05-08
US20140127971A1
Performing operations; transporting

In-situ monitoring system with monitoring of elongated region

#51 | 2013-08-29
US20130224890A1
Electricity

Feedback control using detection of clearance and adjustment for uniform topography

#52 | 2012-11-01
US20120276817A1
Performing operations; transporting

EDDY CURRENT MONITORING OF METAL RESIDUE OR METAL PILLARS

#53 | 2012-11-01
US20120276662A1
Electricity

EDDY CURRENT MONITORING OF METAL FEATURES

#54 | 2012-11-01
US20120276661A1
Electricity

High sensitivity eddy current monitoring system

#55 | 2012-03-15
US20120064801A1
Performing operations; transporting

Feedback control of polishing using optical detection of clearance

#56 | 2011-08-04
US20110189925A1
Electricity

High Sensitivity Real Time Profile Control Eddy Current Monitoring System

#57 | 2011-08-04
US20110189856A1
Performing operations; transporting

High Sensitivity Real Time Profile Control Eddy Current Monitoring System

#58 | 2010-11-04
US20100279435A1
Performing operations; transporting

TEMPERATURE CONTROL OF CHEMICAL MECHANICAL POLISHING

InventorID:

415168 ⎘