Inventor profile of:

Ingemar Carlsson

City:

Milpitas, California

Country:

United States

Published Applications:

35

Last publication date:

2022-02-10

Top Assignees for applications by Ingemar Carlsson

The entities that hold a legal rights for patent applications filed by inventor Carlsson Ingemar:

Recent patent applications by Carlsson Ingemar

Ingemar Carlsson from Milpitas, US has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2022-02-10
US20220043095A1
Physics

Resistivity-based adjustment of thresholds for in-situ monitoring

#2 | 2019-05-09
US20190134775A1
Performing operations; transporting

Determination of gain for eddy current sensor

#3 | 2019-01-31
US20190035699A1
Electricity

Inductive monitoring of conductive loops

#4 | 2018-07-19
US20180203090A1
Physics

Resistivity-based calibration of in-situ electromagnetic inductive monitoring

#5 | 2018-07-19
US20180203089A1
Physics

Resistivity-based adjustment of measurements from in-situ monitoring

#6 | 2018-03-22
US20180079052A1
Performing operations; transporting

Endpoint detection with compensation for filtering

#7 | 2017-12-21
US20170365532A1
Electricity

Inductive monitoring of conductive trench depth

#8 | 2017-06-01
US20170151647A1
Performing operations; transporting

Endpoint control of multiple substrate zones of varying thickness in chemical mechanical polishing

#9 | 2016-06-09
US20160158908A1
Performing operations; transporting

Determination of gain for eddy current sensor

#10 | 2015-12-24
US20150371913A1
Electricity

Inductive monitoring of conductive trench depth

#11 | 2015-08-13
US20150224623A1
Performing operations; transporting

Adjusting eddy current measurements

#12 | 2015-04-30
US20150118766A1
Electricity

Determination of gain for eddy current sensor

#13 | 2015-04-30
US20150118765A1
Electricity

Determination of gain for eddy current sensor

#14 | 2014-08-07
US20140222188A1
Physics

ENDPOINT CONTROL OF MULTIPLE SUBSTRATES OF VARYING THICKNESS ON THE SAME PLATEN IN CHEMICAL MECHANICAL POLISHING

#15 | 2014-05-08
US20140127971A1
Performing operations; transporting

In-situ monitoring system with monitoring of elongated region

#16 | 2014-01-30
US20140030956A1
Performing operations; transporting

CONTROL OF POLISHING OF MULTIPLE SUBSTRATES ON THE SAME PLATEN IN CHEMICAL MECHANICAL POLISHING

#17 | 2014-01-23
US20140024293A1
Performing operations; transporting

Control Of Overpolishing Of Multiple Substrates On the Same Platen In Chemical Mechanical Polishing

#18 | 2013-08-29
US20130224890A1
Electricity

Feedback control using detection of clearance and adjustment for uniform topography

#19 | 2012-11-01
US20120276817A1
Performing operations; transporting

EDDY CURRENT MONITORING OF METAL RESIDUE OR METAL PILLARS

#20 | 2012-11-01
US20120276662A1
Electricity

EDDY CURRENT MONITORING OF METAL FEATURES

#21 | 2012-11-01
US20120276661A1
Electricity

High sensitivity eddy current monitoring system

#22 | 2012-03-15
US20120064801A1
Performing operations; transporting

Feedback control of polishing using optical detection of clearance

#23 | 2012-03-01
US20120053717A1
Performing operations; transporting

Endpoint control of multiple substrates of varying thickness on the same platen in chemical mechanical polishing

#24 | 2011-12-08
US20110300775A1
Performing operations; transporting

Control of overpolishing of multiple substrates on the same platen in chemical mechanical polishing

#25 | 2011-12-01
US20110294400A1
Physics

Determining Physical Property of Substrate

#26 | 2011-02-24
US20110046918A1
Physics

METHODS AND APPARATUS FOR GENERATING A LIBRARY OF SPECTRA

#27 | 2010-10-14
US20100261413A1
Physics

Determining physical property of substrate

#28 | 2010-05-20
US20100124792A1
Performing operations; transporting

Eddy current sensor with enhanced edge resolution

#29 | 2010-05-13
US20100120331A1
Performing operations; transporting

ENDPOINT CONTROL OF MULTIPLE-WAFER CHEMICAL MECHANICAL POLISHING

#30 | 2010-05-13
US20100120330A1
Performing operations; transporting

Endpoint control of multiple-wafer chemical mechanical polishing

#31 | 2009-02-05
US20090033942A1
Physics

Determining physical property of substrate

#32 | 2008-10-02
US20080243433A1
Physics

Methods and apparatus for generating a library of spectra

#33 | 2008-10-02
US20080239308A1
Physics

High throughput measurement system

#34 | 2008-06-19
US20080146120A1
Physics

Determining physical property of substrate

#35 | 2006-08-29
US10922110
-

Determination of position of sensor measurements during polishing

InventorID:

415169 ⎘